TIT# Full-field and scanning microtomography based on parabolic refractive x-ray lenses
AUT# Schroer, C. G.; Kuhlmann, M.; Günzler, T. F.; Benner, B.; Kurapova, O.;
     Patommel, J.; Lengeler, B.; Roth, S. V.; Gehrke, R.; Snigirev, A.;
     Snigireva, I.; Stribeck, N.; Almendárez Camarillo, A.; Beckmann, F.;
SOU# Proc. SPIE (2006), 6318, 6318H
LOC# xv104
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ABS# Hard x-ray full field and scanning microscopy both greatly benefit from
     recent advances in x-ray optics. In full field microscopy, for instance,
     rotationally parabolic refractive x-ray lenses can be used as objective
     lens in a hard x-ray microscope, magnifying an object onto a detector
     free of distortion. Using beryllium as lens material, a hard x-ray
     optical resolution of about 100 nm has been obtained in a field of view
     of more than 500 micrometers. Further improvement of the spatial
     resolution to below 50 nm is expected. By reconstructing the sample from
     a series of micrographs recorded from different perspectives, tomographic
     imaging with a resolution well below one micrometer was achieved. The
     technique is demonstrated using a microchip as test sample. In scanning
     microscopy and tomography, the sample is scanned through a hard x-ray
     microbeam. Different hard x-ray analytical techniques can be exploited as
     contrast mechanism, such as x-ray fluorescence, absorption, or scattering.
     In tomographic scanning mode, they yield for example local elemental,
     chemical, or structural information from inside a specimen. At
     synchrotron radiation sources, a small and intensive microbeam can be
     generated by imaging the source onto the sample position in a strongly
     reducing geometry, e.g., by parabolic refractive x-ray lenses. With
     nanofocusing refractive x-ray lenses, a lateral beam size of 50 nm was
     reached. As an example for scanning tomography, we consider tomographic
     small angle x-ray scattering (SAXS-tomography), reconstructing a series
     of SAXS patterns related to small volume elements inside a polymer rod
     made by injection molding.